What is RSQ-3000
The RSQ-3000 by KOVIS is an advanced sheet resistance (Rs) and resistivity measurement system featuring fully automated mapping capabilities.
Equipped with a proven 4-point probe system, it is optimized for accurate, stable measurements on wafers up to 12inches.
With intuitive Windows-based GUI software and customizable mapping recipes, even non-experts can operate it with confidence, making precision metrology more accessible than ever.
key Features at a Glance
High-Speed Automated Mapping
- Suppots wafers up to 300mm
- 49-point measurement in as fast as 120 seconds (without eight sensor)
- Near-unlimited custom mapping patterns
Accuracy and Repeatability
- Internal resistance accuracy: < ±0.1% (for 1Ω to 1M Ω range)
- Repeatability: ≤ 0.2% CV (10 times on same point with standard wafer)
- Laser height sensor enhances stability
4Point Probe Unit Option
- Micro probes: 600um/ 1,050um / 2,000um
- Macro probes: Jandel 3mm tips
- Z-axis precision motion with R-theta rotational stage for automated contact
User-Friendly Software & Data Management
- Intuitive GUI interface for simple operation
- Measurement results can be saved in CSV or TXT formats
- Real-time 2D/3D graphical display
- MES and TCP/IP support (SEC/GEM, GEM300 optional)
Where Cann it Be Used?
The RSQ-3000 is ideal for a wide range of materials and applications, including:
- Silicon, polysilicon, silicide, metal thin films
- Ion-implanted layers, diffusion layers, epitaxial layers
- Transparent conductive films, FPDs, PLPs
- Even non-metal thin films and composite surfaces
Metrology Specifications
| Feature | Specification |
| Measurement Range | 1 m Ω/□ ~ 10 M Ω/□ |
| Film Thickness Range | 3nm ~ 1,500nm |
| Accuracy | < ±0.1 internal |
| Repeatability | < 0.2% CV |
| Edge Exclusion | 1mm (Micro) / 3mm(Macro) |
| Measurement Speed | 120 sec for 49 points |
| stage System | Z-axis + R-Theta rotation |
| Software funtions | Self-test, SPC, custom mapping patterns |
Why RSQ-3000?
Go beyond basic measurements-gain real process insight.
Precise Rs and resistivity data is essential for evaluating thin film quality and process consistency.
The RSQ-3000 delivers highly repeatable with built-in SPC features, enabling faster process optimization and tighter quality control
Recommended For:
- Semiconductor and display process engineers
- R&D labs seeking precise electrical measurement tools
- Production teams handling high-mix, low-volume fabrication
- Metrology professionlas aiming for data-driven quality control
I am a sales representative at the headquarters of Kovis Technology.
I am committed to providing you with courteous and professional support at all times.
Whether you are looking for the most suitable metrology equipment or need assistance with sample measurements, I am here to help.
Please don’t hesitate to reach out — I would be happy to assist you, even with the smallest inquiries.
You can contact me via the email address on my name tag: Hy.kang@Kovistek.com.
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